The Foundations of Vacuum Coating Technology

Передня обкладинка
William Andrew, 21 серп. 2018 р. - 378 стор.

The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries.

  • History and detailed descriptions of Vacuum Deposition Technologies
  • Review of Enabling Technologies and their importance to current applications
  • Extensively referenced text
  • Patents are referenced as part of the history
  • Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology
  • Glossary of Terms for vacuum coating
 

Вибрані сторінки

Зміст

1 About This Book
1
2 Vacuum Technology
17
3 Plasmas and Plasma Enhanced CVD
61
4 Physical Sputtering and Sputter Deposition
87
5 Thermal Evaporation and Deposition in Vacuum
151
6 Cathodic Arc Vaporization and Cathodic Arc Vapor Deposition
185
7 Ion Plating
197
8 Condensation Nucleation Interface Formation and Film Growth
221
Historical Timeline
241
Glossary of Terms Used in Vacuum Coating
263
Index
355
Back Cover
362
Авторські права

Інші видання - Показати все

The Foundations of Vacuum Coating Technology
D. M. Mattox
Обмежений попередній перегляд - 2003
The Foundations of Vacuum Coating Technology
D. M. Mattox,Donald M. Mattox
Обмежений попередній перегляд - 2003
The Foundations of Vacuum Coating Technology
Donald M. Mattox
Обмежений попередній перегляд - 2013
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Загальні терміни та фрази

adhesion alloy aluminum Annual Technical Conference anode Appl applications arc vaporization assigned atoms called carbon cathode chemical vapor deposition condensation contamination D.M. Mattox deposited film depositing material deposition process developed diffusion pump electrical energy Example filed film deposition fixture gases getter glass glow discharge heating interface ion beam ion beam deposition ion bombardment ion plating ion source ionization J.J. Thompson laser layer magnetic field magnetron sputtering mercury metal molecules nucleation optical coatings oxide particles patent PECVD Phys Physical Vapor Deposition plasma source polymer pressure properties published pulsed PVD technology reactive deposition reactive sputter seal semiconductor silicon Society of Vacuum species sputter cleaning sputter deposition sputtering target stress structure substrate surface Technical Conference Proceedings technique Technol temperature thermal evaporation thickness Thin Films Thin Solid Films tion tube vacuum chamber Vacuum Coaters Vacuum Coating Technology vacuum deposition vacuum gauge vacuum pump vacuum technology valve vaporization source voltage

Про автора (2018)

Donald M. Mattox obtained his B.S degree in Physics from Eastern Kentucky State University. He served as a meteorologist and Air Weather Officer in the USAF during and after the Korean War. He then obtained a M.S. degree in Solid State Physics from the University of Kentucky in 1960. In 1961 he went to work at Sandia National Laboratories (SNL). Don was a manager and member of the Technical staff at SNL for 27 years and has been a consultant to the vacuum coating industry for over 28 years. In 1995 he was the recipient of the American Vacuum Society Albert Nerken Award "For his invention of the ion plating process and its continued development." In 2007 Don received the Society of Vacuum Coaters Nathaniel Sugerman Award “For his development of the ion plating process and long-term commitment to education in the vacuum coating community. Don has published numerous papers and book chapters on the subject of Physical Vapor Deposition (PVD) processing and technology transfer from R&D to production. He is the author of Handbook of Physical Vapor Deposition (PVD) Processing (1st edition 1998, 2nd edition 2010) published by Elsevier and Foundations of Vacuum Coating Technology, published by William Andrew/Elsevier (1st edition 2003).

Бібліографічна інформація

НазваThe Foundations of Vacuum Coating Technology
АвторDonald M. Mattox
Видання2
ВидавецьWilliam Andrew, 2018
ISBN0128130857, 9780128130858
Обсяг378 стор.
  
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