Відгуки відвідувачів - Написати рецензіюНе знайдено жодних рецензій. Пов’язані книги
Зміст
Інші видання - Переглянути всі
Загальні терміни та фразиabrasive alloy aluminum Ångstroms anode arc vaporization atoms called carbon chamber chemical bond chemical vapor deposition cleaning Coaters compound contamination corrosion D.M. Mattox density depo deposited film deposition process diffusion elec electrical electroplating emission energy etching Example film deposition film formation fixture flow fluid formed gaseous gases getter glass heating interface ion beam ion bombardment ion implantation ion plating ionization laser layer liquid magnetic field magnetron magnetron sputtering mechanical metal molecules molten nucleation optical optical coatings oxide particles PECVD Phys physical vapor deposition plasma source polymer produced properties pulsed pump vacuum technology PVD technology radiation reactive deposition reactive gas region removed rinse seal semiconductor processing silicon Society of Vacuum solvent species sputter deposition sputtering target stress structure substrate surface technique Technol temperature thermal evaporation thickness Thin Film tion U.S. Patent vacuum coating vacuum deposition vacuum gauge vacuum pump vacuum technology valve vaporization source voltage Бібліографічна інформація |